Microfluidic device and analyzing device using the same

ABSTRACT

The conventional micropump and the conventional micromixer have the following problems. In a mechanical or hydrodynamic method, the structure of the inside of a flow path is complex so as to easily cause clogging, and manufacturing cost is high, and dead volume is large. Additionally, in an electrical method, the conventional micropump or the conventional micromixer was incapable of operating with a liquid having the concentration of a physiological saline that is important in the medical or biological field although the structure of the flow path is simple. These problems are solved by applying an AC voltage to a pair of electrodes in which an electrode-to-electrode gap between the pair of electrodes is vertically arranged and by generating the flow of a fluid in the direction opposite to gravity along the electrode-to-electrode gap. A micropump ( 43, 44 ) can be realized especially by forming a micro-sized flow path ( 11 ) in the vertical direction along the electrode-to-electrode gap, and a micromixer ( 41 ) can be realized by forming a micro-sized flow path ( 11 ) in the horizontal direction to cross at right angle to the electrode-to-electrode gap.

BACKGROUND ART

1. Technical Field

This invention relates to a microfluidic device that has micro-sizedflow paths dug into a glass substrate or a plastic substrate so as tomake an analysis or produce a reaction in the flow paths by use of smallamounts of samples and, more specifically, to a micropump that generatesa flow in the direction of a flow-path axis while driving liquids inflow paths and to a micromixer that stirs and mixes liquids togetherwhile generating a swirling flow. Additionally, this invention relatesto an analytical instrument that uses liquid or a particulate materialflowing in liquids as a sample and that measures progress informationabout reactions to a reagent or collects reaction products.

2. Description of the Related Art

In recent years, to reduce the amount of samples and save process steps,a reactor or an analysis method that uses a microfluidic device widelyhas spread. An electro-osmotic flow or a pressure flow is widely used asa method for conveying liquids in the microfluidic device. However,disadvantageously, many high-voltage power supplies and many pumps willbe needed, and peripheral devices will be made large in size ifmicro-sized flow paths are complexly structured. Additionally, thereremain unsolved problems, such as the “dead volume” problem of beingincapable of reducing the rate of useless samples by use of anelectro-osmotic flow or a pressure flow although the amount of samplesto be used has become small by micronizing a flow path.

To make the whole device compact, a pump formed in the microfluidicdevice has been designed. Examples of such pumps include a mechanicalpump using a diaphragm shown in Patent Document 1 and an electric pumpusing the action of an AC electro-osmotic flow shown in Non-PatentDocument 1. However, the mechanical pump has defects one of which is thefact that special materials, such as piezoelectric material and bimetal,are needed and another one of which is the fact that many productionprocesses must be followed. Therefore, a rise in manufacturing costs iscaused, and a complex structure having great “dead volume” is formed.Additionally, disadvantageously, clogging is liable to occur, and apulsating flow is caused. In contrast, the electric pump advantageouslyhas a simple structure. However, the electric pump is not operated withthe electrical conductivity (1.6 siemens per meter (S/m)) of aphysiological saline used and important in medical and biologicalfields, and is only operated with the electrical conductivity of aliquid which is equal to or less than 1/100 (i.e., about 10 millisiemensper meter (mS/m)) of that of the physiological saline at a maximum.

On the other hand, the microfluidic device is characterized in that adiffusion-controlled chemical reaction is accelerated by a size effect,in that a slight amount of fluid is treated in a tightly-sealed state,hence in that environmental pollution can be prevented, in that atemperature-control response is swift, in that a reaction field havingno temperature distribution can be obtained, and in that poisonousmaterials or an unstable, explosive sample can be managed under safeenvironmental conditions. Therefore, the microfluidic device also hasbeen highly expected as a microchemical reactor. However,disadvantageously, it is difficult to secure a necessary reaction time,because one of the restrictions imposed on the microfluidic device isthat the flow path, which is a reaction field, is short.

To hasten the reaction time, various mixers have been designed. Examplesof such mixers include a hydrodynamic mixer (chaotic mixing) in which anobstacle is placed in a flow path as shown in Patent Document 2 and anelectric mixer that uses an electrothermal effect or an ACelectro-osmotic flow as shown in Non-Patent Document 2 and PatentDocument 3. However, the hydrodynamic mixer needs a specialmicrofabrication technique, and has many production processes, and henceis high in manufacturing costs. In addition, disadvantageously, thehydrodynamic mixer has a complex flow path structure that easily causesclogging, and has great flow path resistance resulting from the use of aflow force for stirring. On the other hand, the electric mixer has theadvantage of having a simple structure as already described in the pump.However, the electric mixer is not operated with the electricalconductivity of a physiological saline used and important in medical andbiological fields, and is only operated with the electrical conductivityof a liquid which is equal to or less than 1/100 of that of thephysiological saline at a maximum.

[Patent Document 1] WO 98/51929

[Patent Document 2] WO 03/011443

[Patent Document 3] Japanese Unexamined Patent Application PublicationNo. 2006-320877

[Non-Patent Document 1] A. B. D. Brown, C. G. Smith, and A. R. Rennie:“Pumping of water with ac electric fields applied to asymmetric pairs ofmicroelectrodes”, Physical Review E, vol. 63, 016305 (2000)

[Non-Patent Document 2] Marin Sigurdson, Dazhi Wang, and Carl D.Meinhart: “Electrothermal stirring for heterogeneous immunoassays”, Labon a Chip, vol. 5, pp. 1366-1373 (2005)

SUMMARY OF THE INVENTION

As described in the background art, the conventional micropump and theconventional micromixer have the following defects. According to amechanical or hydrodynamic method, the structure of the inside of a flowpath is complex so as to easily cause clogging, and manufacturing costsare high, and the dead volume is great. Additionally, although anelectrical method is simple, the conventional micropump or theconventional micromixer is incapable of operating with a liquid havingthe concentration of a physiological saline that is important in themedical or biological field.

The present invention solves the above problems by disposing two flatelectrodes used as a pair so that an electrode-to-electrode gaptherebetween is directed in the vertical direction or in the diagonaldirection and by generating a fast flow ascending in the directionopposite to gravity along the electrode-to-electrode gap while applyingan AC voltage thereto. The device of the present invention differs fromthe conventional chip microfluidic device. In more detail, the device ofthe present invention is used in a state of being vertically oriented,whereas the conventional chip microfluidic device is used in a state ofbeing laid on a horizontally oriented plane. Especially, the micropumpof the present invention is realized by forming a micro-sized flow pathin the vertical direction along the electrode-to-electrode gap, and amicromixer is realized by forming a micro-sized flow path in thehorizontal direction intersecting with the electrode-to-electrode gap atright angles.

According to a method of using AC electrodes which is superior in havinga simple structure, the microfluidic device provided by the presentinvention realizes a micropump or a micromixer that exhibits sufficientperformance even in a liquid having a high electrical conductivity, suchas a physiological saline in which the conventional device does notoperate.

The micropump of the present invention not only can perform accuratesetting by controlling an AC voltage applied to the electrodes but alsocan operate even in a closed circulatory flow path, and hence twomicropumps can be disposed at two positions, respectively, in thecirculatory flow path. With this structure, the selection from betweenthe clockwise circulating direction and the counterclockwise circulatingdirection, the flow speed, and the stop position can be freelycontrolled with high accuracy by using a simple electric circuit, and auser-friendly micropump can be achieved.

Additionally, the micromixer of the present invention can operate evenin a state in which a flow in the direction of the flow path is stopped.In the flow-stopped state, mixing in an extremely short distance thatcorresponds to the size (about four times as long as the width of theflow path) of two generated eddies can be continuously performed for anarbitrary time, and high-performance mixing in which the amount ofsamples consumed is small can be achieved.

Additionally, an analytical instrument having less dead volume isachieved by using a microfluidic device including the micropump and themicromixer of the present invention.

This specification contains the contents mentioned in the descriptionand/or the drawings of Japanese Patent Application No. 2006-340628 thatis the basis of the priority of the present application.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a partially enlarged view of a conventional microfluidicdevice.

FIG. 2 is an enlarged view of a micropump of the present invention.

FIG. 3 is an elevational view of a microfluidic device provided with themicropump.

FIG. 4 is a photograph in which a flow line near an inflow port of themicropump is visualized.

FIG. 5 is a graph showing characteristics of the micropump.

FIG. 6 is an enlarged view of a micromixer of the present invention.

FIG. 7 is an elevational view of a microfluidic device provided with themicromixer.

FIG. 8 is a photograph in which eddies of the micromixer are visualized.

FIG. 9 is a photograph in which eddies of the micromixer are visualizedwhen there is a flow in the horizontal direction.

FIG. 10 is an elevational view of the microfluidic device in whichstirring is performed by a space between parallel flat substrates.

FIG. 11 is a general view of an analytical instrument of the presentinvention.

FIG. 12 is an elevational view of a microfluidic device used for theanalytical instrument.

FIG. 13A to FIG. 13D are views explaining the operation of themicrofluidic device used in the analytical instrument.

FIG. 14 is a partially enlarged view of a detecting unit of theanalytical instrument.

FIG. 15 is a graph showing analysis results.

FIG. 16 is an elevational view of a microfluidic device in which flowsare combined together through spaces each of which lies between parallelflat substrates.

FIG. 17 is an elevational view of a microfluidic device in which a flowis divided by spaces each of which lies between parallel flatsubstrates.

DETAILED DESCRIPTION OF THE INVENTION

A detailed description will be hereinafter given of embodiments of amicropump and a micromixer by a microfluidic device of the presentinvention and embodiments constituting an analytical instrument.

Embodiment 1

First, a description will be given of a flow of a microfluid generatedby action from AC electrodes. An electrothermal effect shown inNon-Patent Document 2 or a method of using the phenomenon of an ACelectro-osmotic flow shown in Patent Document 3 is known as anelectrical method of allowing a fluid to run in a micro-sized space.

FIG. 1 is a partially enlarged view of a conventional microfluidicdevice. The conventional microfluidic device is made up of a substrate100, a pair of electrodes 40, an AC power 31, and sidewalls 18 forming amicro-sized flow path. The present inventors performed experiments usingthe conventional microfluidic device structured as shown in FIG. 1 inwhich the pair of electrodes 40 being in contact with the micro-sizedflow path exist in a horizontally oriented plane. In the experiments,saline solutions differing in electrical conductivity (substantiallyproportional to its concentration) were used, and an AC voltage of 5 MHzwas applied. In a saline solution whose electrical conductivity is equalto or greater than several tens of mS/m, a flow that corresponds to theabove-mentioned two phenomena (i.e., the electrothermal effect and theAC electro-osmotic flow) was not observed. Instead, a significantly slowflow (whose speed is equal to or less than several micrometers/s) whichis rotated in a direction opposite to the direction expected from thetwo phenomena, was observed.

FIG. 2 is an enlarged view of a micropump of the present invention. Themicropump is the same in the basic structure as the conventionalmicrofluidic device, and is different in the direction to be arrangedtherefrom. An experiment was performed as shown in FIG. 2 in which themicrofluidic device is vertically oriented and in which the direction ofan electrode-to-electrode gap of the pair of electrodes 40 is set in thevertical direction. As a result, the present inventors found that a fastflow (several hundred micrometers/s to several millimeters/s) running inthe direction of the arrow in a micro-sized flow path 11 is generated.This flow, which is different from the above-mentioned, two well-knownphenomena, occurs in a saline solution whose electrical conductivity isequal to or greater than several tens of mS/m. In this flow, the liquidbetween the electrodes always runs in the direction opposite to gravity,and hence the present inventors presumed that this flow is a buoyantflow generated by Joule heat in the saline solution.

FIG. 3 is an elevational view of a microfluidic device provided with themicropump. In an embodiment shown in FIG. 3, the micropump 10 is formedby combining a closed circulatory micro-sized flow path 11 with a pairof electrodes 40 arranged in the vertical direction.

FIG. 4 is a photograph in which a flow line near an inflow port of themicropump is visualized. The photograph of FIG. 4 is one image obtainedby pouring a physiological saline (whose electrical conductivity is 1.6S/m) having fluorescent beads (whose particle size is 6 μm) dispersed tovisualize its flow into the microfluidic device of FIG. 3 and byobserving the flow running below the pair of electrodes 40. It should benoted that this image was obtained by superimposing photographed videoimages on each other for five seconds, and was subjected to imageprocessing to obtain tracks of the fluorescent beads.

FIG. 5 is a graph showing characteristics of the micropump. FIG. 5 showsa result of characteristics with respect to a voltage applied to a pairof electrodes, which is obtained by measuring speed from the length ofeach track of the fluorescent beads shown in FIG. 4. The twocharacteristics were obtained by being measured in two circulatoryclosed-loop flow paths one of which (∘) has a flow path cross-sectionhaving a depth of 650 μm and a width of 850 μm and the other one ofwhich (♦) has a flow path cross-section having a depth of 225 μm and awidth of 320 μm, respectively. A flow velocity of about 400 μm/s and aflow velocity of about 150 μm/s were respectively obtained under an ACapplied voltage of 5 MHz and 10V. It is understood that the flow runningin the circulatory closed-loop flow path is a laminar flow(Hagen-Poiseuille flow) having a parabolic velocity distribution inwhich the velocity is maximized at the center of the flow path.Therefore, it was confirmed that each microfluidic device of FIGS. 2 and3 acts as a micropump generating a flow that has a considerably fastvelocity (several hundred micrometers/s) and that is a nonturbulent,smooth flow.

Embodiment 2

FIG. 6 is an enlarged view of a micromixer of the present invention. Thepresent inventors further performed an experiment using a devicestructured so that a flow path extending in the horizontal directionintersects the pair of electrodes 40 arranged in the vertical directionas shown in FIG. 6. As a result, the present inventors found that twoeddies between which an electrode-to-electrode gap lies occur.

FIG. 7 is an elevational view of a microfluidic device provided with themicromixer. The present inventors performed an experiment as followed. AY-shaped flow path having two inflow paths is produced as shown in FIG.7, and a physiological saline is poured from a first inflow port 12,whereas a physiological saline containing fluorescent beads forexperimental observation is poured from a second inflow port 13. Thefluorescent beads in a laminar-flow state flowing near the lower wallsurface in the flow path moved close to the upper wall surface, oppositeto the lower one of the flow path, at a fast speed when the fluorescentbeads passed through the electrode-to-electrode gap (50 μm) of the pairof electrodes 40. From this fact, it was understood that the flowcrossing the flow path between the two eddies is considerably fast, andhence the device can be used as a micromixer 30.

The micromixer 30 of the present invention can generate eddiesregardless of the presence or absence of a flow in the direction of theflow path. Therefore, if the flow is stopped in a state in which asample is kept within a distance (about four times as long as the flowpath width) equal to twice as long as eddy, mixing and stirring can becontinuously performed for a long time.

FIG. 8 is a photograph in which eddies of the micromixer are visualized.The photographic image of FIG. 8 is obtained by visualizing eddiesgenerated in the state of stopping the flow by use of the fluorescentbeads. As can be understood from FIG. 8, if the micromixer of thepresent invention is used, small amounts of sample plugs that correspondto a length which is about four times as long as the flow path width canbe treated. Therefore, a reactor, an inspection device, or an analyticalinstrument having small dead volume can be easily realized.

FIG. 9 is a photograph in which eddies of the micromixer are visualizedwhen there is a flow in the horizontal direction. The photograph of FIG.9 was taken in a state in which the micromixer was set under thepresence of a flow of 5 μL/minute. As shown in FIG. 9, it is apparentthat the micromixer according to this embodiment operates under thepresence of such a flow, and the micromixer can, of course, be used as apart of a continuous on-line process.

In the two embodiments mentioned above, the two examples were shown. Inone of the two examples, the direction of a part of the micro-sized flowpath being in contact with the pair of electrodes 40 is parallel to,i.e., intersects at an angle of zero degrees with that of theelectrode-to-electrode gap lying between the pair of electrodes 40, and,in the other example, the direction of a part of the micro-sized flowpath being in contact therewith is perpendicular to, i.e., intersects atright angles with that of the electrode-to-electrode gap lyingtherebetween. However, the present invention is not limited to these twoangles. If these intersect with each other at an angle of degreesgreater than zero degrees and smaller than 90 degrees, it is possible torealize a device concurrently having two functions one of which is topump fluids flowing in the flow path in the direction of the axis of theflow path and the other one of which is to move fluids flowing in theflow path in the vertical direction and mix these fluids together.

Additionally, in the two embodiments mentioned above, a description wasgiven of the two slender flow paths one of which is a circulatoryclosed-loop type and the other one of which is a circulatory open-looptype in which fluids flow from an inflow end to an outflow end. However,the gist of the present invention does not reside in the imposition oflimitations on the width of the flow path. If the micropump and themicromixer of the present invention are structured to have effectiveoperations, any kind of flow path can be employed.

FIG. 10 is an elevational view of the microfluidic device in whichstirring is performed by a space between parallel flat substrates. Forexample, in FIG. 10, a sample substrate 45 having a surface onto which asample is applied and fixed and an electrode substrate 46 having asurface onto which a pair of electrodes 40 are patterned by opticallithography are allowed to face each other, and a space between theparallel flat substrates which is formed by sandwiching a spacer 47ranging from about several tens of micrometers to about several hundredmicrometers therebetween is used as a flow path.

In a flow path having a two-dimensional extension as in the example ofFIG. 10, the flow of a liquid ascending along the electrode-to-electrodegap of the pair of electrodes 40 descends at a position away from thepair of electrodes 40, and circulates in the space between the parallelflat substrates. In an analysis of a biologic sample, there are manyprocesses requiring a long-time reaction, such as gene hybridization,enzyme reaction, and antigen-antibody reaction. The use of themicrofluidic device provided with the pair of electrodes 40 of FIG. 10makes it possible to stir small amounts of samples in the space betweenthe parallel flat substrates. As a result, the reaction rate isaccelerated by stirring, and hence the process time for inspection oranalysis can be shortened. This device is effective especially for arraychips used to analyze biological materials, such as gene chips orprotein chips.

As described in the above embodiments, according to the presentinvention, it is possible to realize a micropump and a micromixer bothof which are easily controlled in a simple structure and are operatedwith liquids (including a physiological saline) which has an electricalconductivity of 10 mS/m or more. Additionally, the present invention canbe applied to all microfluidic devices that can use the micropump andthe micromixer. Still additionally, the present invention can be appliedto all inspection devices and analytical instruments that can be used.Concrete examples will be hereinafter shown.

Embodiment 3

FIG. 11 is a general view of an analytical instrument provided with themicrofluidic device of the present invention. In this embodiment, anexample is shown in which the present invention is applied especiallyfor a platelet aggregation test by which a platelet clump size ismeasured, and the structure and the operation of the instrument will bedescribed.

As a preprocessing step for inspection, a platelet sample ofplatelet-rich plasma (PRP) or platelet-poor plasma (PPP) is preparedfrom the blood which has been drawn from a subject and mixed into 3.8%citric-acid solution, and is incubated at 37° C. equal to the bodytemperature in a sample reservoir (not shown). On the other hand, 0.3 μMepinephrine is produced as a platelet-aggregating agent, and is set in areservoir for the aggregating agent provided at a liquid supply pump 16.

The plasma of the incubated platelet sample is replaced with aphysiological saline, and then a small amount of the sample is droppedinto an open well provided in a microfluidic device 1 by use of a pipet.This microfluidic device 1 is vertically oriented, and is set on a stageof a microscope 32. The liquid supply pump 16 that supplies aplatelet-aggregating agent and a suction pump 17 that sucks out a wastefluid or the like are connected to the microfluidic device 1 throughtubes. The AC power 31 that drives the micropump and the micromixer toois connected to the microfluidic device 1 through three electric cables.

The state and the change of the platelet in the microfluidic device areconverted into an electric signal by a CCD camera 33 disposed on themicroscope 32, and is input to a data acquiring and analyzing device 34that performs image analysis, image processing, image storage, and thelike. A process controller 35 controls a process necessary forinspection according to a program through interfaces with the liquidsupply pump 16, the suction pump 17, the AC power 31, and the dataacquiring and analyzing device 34.

FIG. 12 is an elevational view of a microfluidic device used for theanalytical instrument. The structure of the microfluidic device used inthis embodiment will be described with reference to FIG. 12. The firstinflow port 12 is an open well, and a sample is injected through thisport according to, for example, a method of dropping it by use of apipet. The second inflow port 13 and the outflow port 14 are connectedto the liquid supply pump 16 and the suction pump 17 of FIG. 11,respectively.

The micro-sized flow path 11 has a circulating-flow-path structure, andincludes a flow path intersection 15 made up of a flow path extendingfrom the first inflow port 12 and a flow path extending from the secondinflow port 13, the micromixer 41 mentioned in the second embodiment ofthe present invention, the micropump 43 of the present inventioncirculating in the clockwise direction, a T-shaped intersection flowpath 19 leading to the outflow port 14, and the micropump 44 of thepresent invention circulating in the counterclockwise direction whichare arranged in this order.

FIG. 13A to FIG. 13D are views explaining the operation of themicrofluidic device used in the analytical instrument. Next, theoperation of the analytical instrument will be described according tosteps programmed by the process controller of FIG. 11. A descriptionthereof will be started from a step in which all flow paths of themicrofluidic device of FIG. 12 are pre-filled with a physiologicalsaline 20. Although various methods can be proposed as procedures forfilling the flow paths with this physiological saline, a description ofthis is omitted here. The cross-section of the circulatory flow pathused here is a rectangle having a width of 400 μm and a depth of 320 μm.

First, a drop of platelet sample 22 (20 to 50 μL) is put from the pipetinto the first inflow port 12 that is an open well, and an inspectionprocess is started. FIG. 13A shows a state near the flow pathintersection 15 when the inspection process is started.

Thereafter, when the liquid supply pump 16 (2 μL/minute) and the suctionpump 17 (2 μL/minute) are turned on at the same time, a physiologicalsaline 20 flows out from the outflow port 14, and a platelet-aggregatingagent 23 having the same volume flows in from the second inflow port 13.After six seconds, a plug of the platelet-aggregating agent 23 of 1500μm is generated centering the flow path intersection 15 as shown in FIG.13B.

Thereafter, when only the liquid supply pump 16 is turned off (in thestate in which six seconds have elapsed), the platelet sample 22 isinjected from the first inflow port 12, which is an open well, throughthe cross intersection flow path this time. After three seconds, a plugis generated in which the platelet sample 22 of 750 μm is sandwiched atthe center of the platelet-aggregating agent 23 whose length is 1500 μmas shown in FIG. 13C. At this stage, the suction pump 17 is also turnedoff.

Thereafter, a terminal of the AC power 31 that is connected to themicropump 44 used to circulate liquids in the counterclockwise directionis turned on, and the plug including the sample is moved toward themicromixer. This state is shown in FIG. 13D.

When the plug including the sample reaches the micromixer 41, a terminalof the AC power 31 that is connected to the micromixer 41 is turned on,and the platelet sample 22 and the platelet-aggregating agent 23 startbeing mixed and stirred together.

FIG. 14 is a partially enlarged view of a detecting unit of theanalytical instrument. A change in the size of the clump of the plateletwith the lapse of the stirring time can be observed with a monitor 36via the microscope 32 and the CCD camera 33 as shown in FIG. 14. At thesame time, measurement and analysis can be performed for succeedingsteps.

FIG. 15 is a graph showing analysis results. FIG. 15 shows an analysisexample of a comparison between the particle-size distribution of theplatelet aggregate obtained when the platelet sample and the aggregatingagent start being mixed together and the particle-size distribution ofthe platelet aggregate obtained when three minutes elapse after beingmixed.

If the micropump 43, which circulates liquids in the clockwisedirection, is used together with the micropump 44, which circulatesliquids in the counterclockwise direction, as a pair, the micropump 43will be useful especially when accurate position control is requiredalthough this has not been described here. For example, the micropump 43is useful when the position of a sample plug is caused to exactlycoincide with the electrode-to-electrode gap of the micromixer 41 whileperforming fine position control or when an air plug generated duringpreparation for filling all flow paths with a physiological saline or aplug of a specific reaction product is led to the T-shaped flow path ofthe outflow port so as to extract the plug therefrom.

The volume of the platelet sample and the volume of theplatelet-aggregating agent used for the measurement in this embodimentare 0.1 μL and 0.2 μL, respectively. As described above, according tothe present invention, an analytical instrument that is extremely smallin the amount of samples consumed and in dead volume can be realized.

Although the aggregometer using a platelet sample, for example, wasdisclosed in the embodiment of the analytical instrument of the presentinvention, the biological materials to which the microfluidic deviceproposed here are applied is not limited to platelets. The biologicalmaterials include all of biochemical materials and biologic samples eachof which is microns in diameter or smaller than microns, such as gene,antibody, protein, virus, cell, blood, and bacteria.

Additionally, according to the gist of this proposal, the sample used inthe analytical instrument is not limited to biological materials. Allchemicals that require a mixer that causes reactions in microchannelscan be used in the analytical instrument, and all solutions anddispersion liquids that are required to be conveyed by a pump inmicrochannels can be used in the analytical instrument.

FIG. 16 and FIG. 17 are views each of which shows a microfluidic devicestructured to have a space (sandwiched between the electrode substrate46 and a substrate 50 facing the electrode substrate 46) between twoparallel wall surfaces between which a spacer 47 is placed, as in FIG.10. As general properties, in proportion to a decrease in space, itbecomes more difficult for a fluid in such a flow path to flow. Thereason is that the ratio between (two-dimensional) viscous drag that afluid extending in the direction of a plane receives from the wallsurfaces and the (three-dimensional) volume of the fluid becomes greaterin proportion to the narrowing of a space. Therefore, to generate aflow, an extremely great force or pressure is required to be applied.However, the present inventors found that the following twocharacteristics will appear if a pair of electrodes are disposed on thewall surfaces.

The first characteristic is that the speed of an ascending flowgenerated in the electrode-to-electrode gap is not reduced even if thegap is 200 μm or less. Without being limited to this, there is a case inwhich the speed is increased depending on conditions. The secondcharacteristic is that, if the electrode-to-electrode gap of the pair ofelectrodes on the wall surfaces is arranged to be diagonally directed(i.e., in a direction rotated from the vertical direction) whilemaintaining the direction (vertical direction) of the parallel wallsurfaces, a flow generated in the electrode-to-electrode gap is allowedto run in the diagonal direction in the same way along theelectrode-to-electrode gap directed diagonally. However, the speed ofthe flow becomes slower in proportion to an increase in angle, andbecomes approximately zero when the flow is directed in the horizontaldirection (i.e., at an angle of 90 degrees from the vertical direction).

Embodiment 4

FIG. 16 is an elevational view of a microfluidic device in which flowsare combined together through spaces each of which lies between parallelflat substrates. Next, an example of a device using the twocharacteristics mentioned above will be hereinafter shown. Theembodiment shown in FIG. 16 achieves the combining of wide flows by anaction generated by pairs of electrodes arranged to have the shape ofthe reversal of the letter Y.

The pairs of electrodes in this embodiment are disposed such that asecond pair of electrodes 52 and a third pair of electrodes 53 aredisposed diagonally open at the lower end of a first pair of electrodes51 directed in the vertical direction. When an AC voltage is applied toall of the three pairs of electrodes, a diagonal flow running at a speedthat has undergone vector resolution according to an angle with respectto the vertical direction is generated in the electrode-to-electrode gapof the second pair of electrodes 52 and in the electrode-to-electrodegap of the third pair of electrodes 53. Additionally, a fastvertically-ascending flow is generated in the first pair of electrodes51. As a result of the combination of these operations, thecomparatively slow diagonal flow generated by the second and third pairsof electrodes 52 and 53 can join with even slower flows running in theplanar flow paths, and can act like a funnel that sends the resultingflow into the space between the first pair of electrodes 51 betweenwhich a fast flow is running.

FIG. 17 is an elevational view of a microfluidic device in which a flowis divided by spaces each of which lies between parallel flatsubstrates. The embodiment shown in FIG. 17 achieves a function to giveselective distribution/switching to a flow in accordance with some kindof information concerning a sample conveyed to a fast flow runningbetween the first pair of electrodes 51 in a state in which thearrangement of the electrodes shown in the above embodiment is turnedupside down. In this embodiment, for example, particles emittingfluorescence are optically detected, and, based on informationthereabout, a voltage to be applied to the second and third pairs ofelectrodes 52 and 53 is turned on/off or is switched in accordance witha timing at which the particles pass through, and, as a result, onlynecessary particles can be collected at a specific laminar flowposition. In FIG. 17, the AC voltage to be applied to the third pair ofelectrodes 53 is in an OFF state, whereas the first and second pairs ofelectrodes 51 and 52 are in an ON state, and the flow is running in theright upward direction while being guided by the electrodes to which avoltage has been applied.

In each of the embodiments of FIGS. 16 and 17, the device has astructure in which two of the four sides of the device are closed withthe spacer, whereas the other two are brought into an open state, and afluid is supported by a capillary force of the fluid. However, thepresent invention is achieved regardless of the structure or the numberof spacers to be used. Therefore, a spacer that surrounds the device asshown in the embodiment of FIG. 10 may be used, and spacers having anyother shapes may be used.

As described in the above embodiments, according to the presentinvention, it is possible to achieve a microfluidic device having asimple structure in which flows are combined together along electrodessubjected to patterning on wall surfaces, are then guided at a fast flowspeed, and are distributed or classified, without providing partitionsin a flow path of a narrow space lying between two parallel planes.Additionally, fluids can be manipulated unlike in a conventionalmicrofluidic device that uses a thin flow path, and hence the degree offreedom of design of the microfluidic device can be further widened.

The entire contents of all of the publications, the patents, and thepatent applications cited in this specification are hereby incorporatedby reference.

INDUSTRIAL APPLICABILITY

As described above, the present invention achieves a micropump and amicromixer each of which has a simple structure, and provides amicrofluidic device that includes the micropump and the micromixer eachof which serves as a basic part of the microfluidic device.Additionally, the present invention can be applied to all instruments,apparatuses, or machines using the microfluidic device, such as achemical analytical instrument, a biological material inspectionapparatus (μTAS), a microchemical reactor, and a micromachine (MEMS).

1. A microfluidic device comprising: a first substrate and a secondsubstrate that are disposed to face each other with a fluid between thefirst and second substrates; and a pair of electrodes disposed to faceeach other on a surface of the first substrate, the fluid being incontact with the surface; wherein an electrode-to-electrode gap betweenthe pair of electrodes is directed in a vertical direction, and whereinthe fluid flows in a direction opposite to gravity along theelectrode-to-electrode gap by applying an AC voltage to the pair ofelectrodes.
 2. The microfluidic device of claim 1, wherein a micro-sizedflow path is formed that is in contact with the pair of electrodes andthat moves the fluid in a vertical direction.
 3. The microfluidic deviceof claim 1, wherein a micro-sized flow path is formed that is in contactwith the pair of electrodes and that moves the fluid in a horizontaldirection.
 4. The microfluidic device of claim 1, wherein the fluidflows in circle between the first substrate and the second substrate. 5.An analytical instrument using the microfluidic device of claim
 1. 6. Amicrofluidic device comprising: a first substrate and a second substratethat are disposed to face each other with a fluid between the first andsecond substrates; and a pair of electrodes disposed to face each otheron a surface of the first substrate, the fluid being in contact with thesurface; wherein an electrode-to-electrode gap between the pair ofelectrodes is directed diagonally to a vertical direction, and whereinthe fluid flows diagonally in a direction opposite to gravity along theelectrode-to-electrode gap by applying an AC voltage to the pair ofelectrodes.
 7. The microfluidic device of claim 6, wherein the pair ofelectrodes is a first pair of electrodes in which theelectrode-to-electrode gap is directed in a vertical direction, a secondpair of electrodes in which the electrode-to-electrode gap is directeddiagonally with respect to the vertical direction, and a third pair ofelectrodes in which the electrode-to-electrode gap is directeddiagonally symmetrically to the electrode-to-electrode gap of the secondpair of electrodes with respect to the vertical direction, and whereinends of the three pairs of electrodes are disposed to be adjacent toeach other so as to have a trifurcate structure.